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Effects of the distance between the inductance coil and substrates on the microstructure and optical properties of silicon films deposited by ICP-CVD

✍ Scribed by Jinxiao Wang; Yanli Qin; Hengqing Yan; Pingqi Gao; Junshuai Li; Min Yin; Deyan He

No coin nor oath required. For personal study only.

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