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Effects of substrate temperature on structure and mechanical properties of sputter deposited fluorocarbon thin films

✍ Scribed by Suzuki, Yuta; Fu, Haojie; Abe, Yoshio; Kawamura, Midori


Book ID
121348455
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
808 KB
Volume
87
Category
Article
ISSN
0042-207X

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