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Effects of substrate temperature on dielectric and structural properties of Ti and Er co-doped HfO2 thin films

✍ Scribed by Murad Ali Khaskheli; Ping Wu; Xianfei Li; Hui Wang; Shiping Zhang; Sen Chen; Yili Pei

Book ID: 116965140
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 691 KB
Volume: 86
Category: Article
ISSN: 0042-207X
DOI: 10.1016/j.vacuum.2012.03.028

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