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Effects of Substrate Materials on Self-Formation of Ti-Rich Interface Layers in Cu(Ti) Alloy Films

✍ Scribed by K. Ito; S. Tsukimoto; T. Kabe; K. Tada; M. Murakami

Publisher: Springer US
Year: 2007
Tongue: English
Weight: 513 KB
Volume: 36
Category: Article
ISSN: 0361-5235
DOI: 10.1007/s11664-007-0097-5

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