Rutherford Backscattering Spectrometry Analysis of Self-Formed Ti-Rich Interface Layer Growth in Cu(Ti)/Low-kSamples

✍ Scribed by Kazuyuki Kohama; Kazuhiro Ito; Kenichi Mori; Kazuyoshi Maekawa; Yasuharu Shirai; Masanori Murakami

• Publisher: Springer US
• Year: 2009
• Tongue: English
• Weight: 638 KB
• Volume: 38
• Category: Article
• ISSN: 0361-5235
• DOI: 10.1007/s11664-009-0843-y