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Effects of SiC buffer on the structural and photoelectrical properties of ZnO thin films grown on Si(1 1 1) by PLD

✍ Scribed by C.Y. Zhao; Z.R. Liu; B. Sun; J. Tang; P.S. Xu; J.C. Xie

Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
241 KB
Volume
41
Category
Article
ISSN
1386-9477

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ZnO thin films on Si(1 1 1) gr
ZnO thin films on Si(1 1 1) grown by pulsed laser deposition from metallic Zn target
✍ Jie Zhao; Lizhong Hu; Zhaoyang Wang; Jie Sun; Zhijun Wang πŸ“‚ Article πŸ“… 2006 πŸ› Elsevier Science 🌐 English βš– 400 KB

ZnO thin films with highly c-axis orientation have been fabricated on p-type Si(1 1 1) substrates at 400 8C by pulsed laser deposition (PLD) from a metallic Zn target with oxygen pressures between 0.1 and 0.7 mbar. Experimental results indicate that the films deposited at 0.3 and 0.5 mbar have bette