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Effects of rapid thermal annealing on optical quality of GaNP alloys

✍ Scribed by Izadifard, M.; Buyanova, I.A.; Bergman, J.P.; Chen, W.M.; Utsumi, A.; Furukawa, Y.; Wakahara, A.; Yonezu, H.


Book ID
114456088
Publisher
The Institution of Electrical Engineers
Year
2004
Tongue
English
Weight
229 KB
Volume
151
Category
Article
ISSN
1350-2433

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## Abstract Carbon films are deposited on silica glass fibers by radio‐frequency plasma‐enhanced chemical vapor deposition (rf‐PECVD), and the properties of these optical fibers are improved by rapid thermal annealing. The annealing temperatures are set to 100, 200, 300, 400, 500, 550, 600, and 700