𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Effects of pre-treatment and plasma enhancement on chemical vapor deposition of carbon nanotubes from ultra-thin catalyst films

✍ Scribed by Cantoro, M.; Hofmann, S.; Pisana, S.; Ducati, C.; Parvez, A.; Ferrari, A.C.; Robertson, J.


Book ID
123247684
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
710 KB
Volume
15
Category
Article
ISSN
0925-9635

No coin nor oath required. For personal study only.


πŸ“œ SIMILAR VOLUMES


Influence of substrate pre-treatments on
✍ C. Di Franco; G. Scamarcio πŸ“‚ Article πŸ“… 2008 πŸ› Elsevier Science 🌐 English βš– 376 KB

A two-step plasma enhanced chemical vapor deposition procedure has been developed to produce high quality Si x N y H z films for quantum cascade laser applications. The procedure consists in exposing the GaAs substrate to a controlled N 2 plasma previous to the silicon nitride film deposition. The p