Influence of substrate pre-treatments on
β
C. Di Franco; G. Scamarcio
π
Article
π
2008
π
Elsevier Science
π
English
β 376 KB
A two-step plasma enhanced chemical vapor deposition procedure has been developed to produce high quality Si x N y H z films for quantum cascade laser applications. The procedure consists in exposing the GaAs substrate to a controlled N 2 plasma previous to the silicon nitride film deposition. The p