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Effects of physico-chemical properties between poly(ethyleneimine) and silica abrasive on copper chemical mechanical planarization

✍ Scribed by Seo, Jihoon; Yoon, Kwang Seob; Moon, Jinok; Kim, Kijung; Sigmund, Wolfgang; Paik, Ungyu


Book ID
121428883
Publisher
Elsevier Science
Year
2014
Tongue
English
Weight
935 KB
Volume
113
Category
Article
ISSN
0167-9317

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