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The combinatorial effect of complexing agent and inhibitor on chemical–mechanical planarization of copper

✍ Scribed by Tianbao Du; Ying Luo; Vimal Desai

Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
297 KB
Volume
71
Category
Article
ISSN
0167-9317

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The effect of complexing agents on adsorption and desorption of Cu(II) from aqueous solutions using chitosan was investigated. Three complexing agents were used including EDTA (ethylenediaminetetraacetic acid), citric acid, and tartaric acid. It was shown that the isotherm data could be ®tted by the