✦ LIBER ✦

Effects of parameters in femtosecond laser micromachining on ablation of silicon

✍ Scribed by Zhi Chen; Xing Fu; Na Geng; Xiaotang Hu

Book ID: 107626631
Publisher: Tianjin University
Year: 2009
Tongue: Chinese
Weight: 656 KB
Volume: 15
Category: Article
ISSN: 1006-4982
DOI: 10.1007/s12209-009-0040-3

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