✦ LIBER ✦

Laser ablation of silicon dioxide on silicon using femtosecond near infrared laser pulses

✍ Scribed by Tino Rublack; Markus Muchow; Stefan Hartnauer; Gerhard Seifert

Book ID: 116425647
Publisher: Elsevier
Year: 2011
Weight: 573 KB
Volume: 8
Category: Article
ISSN: 1876-6102
DOI: 10.1016/j.egypro.2011.06.167

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Ablation and cutting of planar silicon d

Ablation and cutting of planar silicon devices using femtosecond laser pulses

✍ N. Bärsch; K. Körber; A. Ostendorf; K.H. Tönshoff 📂 Article 📅 2003 🏛 Springer 🌐 English ⚖ 381 KB

Near-infrared femtosecond laser-induced

Near-infrared femtosecond laser-induced crystallization of amorphous silicon

✍ Shieh, Jia-Min; Chen, Zun-Hao; Dai, Bau-Tong; Wang, Yi-Chao; Zaitsev, Alexei; Pa 📂 Article 📅 2004 🏛 American Institute of Physics 🌐 English ⚖ 561 KB

Femtosecond pulsed laser ablation of 3CS

Femtosecond pulsed laser ablation of 3CSiC thin film on silicon

✍ Y. Dong; P. Molian 📂 Article 📅 2003 🏛 Springer 🌐 English ⚖ 298 KB

Laser ablation of silicon in water with

Laser ablation of silicon in water with nanosecond and femtosecond pulses

✍ Ren, Jun; Kelly, Michael; Hesselink, Lambertus 📂 Article 📅 2005 🏛 Optical Society of America 🌐 English ⚖ 177 KB

Microstructuring of silicon with femtose

Microstructuring of silicon with femtosecond laser pulses

✍ Her, Tsing-Hua; Finlay, Richard J.; Wu, Claudia; Deliwala, Shrenik; Mazur, Eric 📂 Article 📅 1998 🏛 American Institute of Physics 🌐 English ⚖ 642 KB

In-vivo intratissue ablation by nanojoul

In-vivo intratissue ablation by nanojoule near-infrared femtosecond laser pulses

✍ Bao-Gui Wang; Iris Riemann; Harald Schubert; Karl-Juergen Halbhuber; Karsten Koe 📂 Article 📅 2007 🏛 Springer-Verlag 🌐 English ⚖ 402 KB