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Effects of nitrogen trifluoride on the growth and properties of plasma-enhanced chemical-vapor-deposited diamond-like carbon films

โœ Scribed by S. S. Ang; G. Sreenivas; W. D. Brown; H. A. Naseem; R. K. Ulrich


Book ID
112817891
Publisher
Springer US
Year
1993
Tongue
English
Weight
546 KB
Volume
22
Category
Article
ISSN
0361-5235

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