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Effects of nitrogen flow rate on titanium nitride films deposition by DC facing target sputtering method

✍ Scribed by Hong Tak Kim, Jun Young Park, Chinho Park

Book ID: 113090768
Publisher: Springer US
Year: 2012
Tongue: English
Weight: 503 KB
Volume: 29
Category: Article
ISSN: 0256-1115
DOI: 10.1007/s11814-011-0219-x

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