✦ LIBER ✦

Effects of Mo/Si multilayer coatings on the imaging characteristics of an extreme-ultraviolet lithography system

✍ Scribed by Duddles, N. J.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Atomic-precision multilayer coating of t

✍ Montcalm, Claude ;Grabner, R. Frederick ;Hudyma, Russell M. ;Schmidt, Mark A. ;S 📂 Article 📅 2002 🏛 The Optical Society 🌐 English ⚖ 160 KB

Mo/B_4C/Si multilayer-coated photodiode

✍ Kjornrattanawanich, Benjawan ;Bajt, Saša ;Seely, John F. 📂 Article 📅 2004 🏛 The Optical Society 🌐 English ⚖ 483 KB

Normal-incidence efficiencies of multila

✍ Seely, John F. ;Brown, Charles M. ;Windt, David L. ;Donguy, Soizik ;Kjornrattana 📂 Article 📅 2004 🏛 The Optical Society 🌐 English ⚖ 250 KB

Effect of an Si3N4/PSG/SiO2multilayer di

✍ I. V. Vanyushin; V. A. Gergel’; N. M. Gorshkova; K. M. Zatolokin; A. N. Knyazev 📂 Article 📅 2006 🏛 SP MAIK Nauka/Interperiodica 🌐 English ⚖ 174 KB

Effect of high-energy electron irradiati

✍ G. G. Bondarenko; M. M. Yakunkin 📂 Article 📅 2012 🏛 SP MAIK Nauka/Interperiodica 🌐 English ⚖ 206 KB

Effect of Al content in an Al/Si layer o

✍ Lai, Zhong-hong; Fang, Hai-tao; Jeon, Jae-ho; Meng, Song-he; Zhu, Jing-chuan 📂 Article 📅 2013 🏛 Elsevier Science 🌐 English ⚖ 34 KB