Atomic-precision multilayer coating of the first set of optics for an extreme-ultraviolet lithography prototype system

✍ Scribed by Montcalm, Claude ;Grabner, R. Frederick ;Hudyma, Russell M. ;Schmidt, Mark A. ;Spiller, Eberhard ;Walton, Christopher C. ;Wedowski, Marco ;Folta, James A.

• Book ID: 115350036
• Publisher: The Optical Society
• Year: 2002
• Tongue: English
• Weight: 160 KB
• Volume: 41
• Category: Article
• ISSN: 1559-128X
• DOI: 10.1364/AO.41.003262