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Effects of MeV ion implantation on metal films

โœ Scribed by M. Ikeyama; K. Saitoh; S. Nakao; H. Niwa; S. Tanemura; Y. Miyagawa; S. Miyagawa


Book ID
107930366
Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
524 KB
Volume
66
Category
Article
ISSN
0257-8972

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๐Ÿ“œ SIMILAR VOLUMES


Effects of ion implantation on structure
โœ H. Watanabe; M. Iwaki ๐Ÿ“‚ Article ๐Ÿ“… 2009 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 492 KB

A Raman spectroscopic study has been carried out on the effects of ion implantation of argon or nitrogen on the structures of ion-plated (IP) carbon films. The carbon films were deposited on WC substrates at room temperature, 200, 250, 300 and 350 ยฐC. Implantation of 150 keV Ar + or N into the films