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Effects of magnet behind the target on discharge and sputtering characteristics in the sputtering apparatus

โœ Scribed by T. Takahashi; S. Iwatubo; M. Asada; M. Naoe


Book ID
113205288
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
359 KB
Volume
281-282
Category
Article
ISSN
0040-6090

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