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Effects of ion beam irradiation on the crystallization of Si–C films

✍ Scribed by Shunichi Hishita; Keiji Oyoshi; Shigeru Suehara; Takashi Aizawa


Book ID
114170691
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
227 KB
Volume
148
Category
Article
ISSN
0168-583X

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