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MeV-Si ion irradiation effects on the electrical properties of HfO2 thin films on Si

✍ Scribed by Xiangkun Yu; Lin Shao; Q.Y. Chen; L. Trombetta; Chunyu Wang; Bhanu Dharmaiahgari; Xuemei Wang; Hui Chen; K.B. Ma; Jiarui Liu; Wei-Kan Chu

Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
142 KB
Volume
249
Category
Article
ISSN
0168-583X

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