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Effects of interface structures on cracking in AlN((11overline 2 0))/α-Al2O3((1overline 1 02))epitaxial films

✍ Scribed by K. Kaigawa; T. Shibata; Y. Nakamura; K. Asai; M. Tanaka; H. Sakai; T. Tsurumi


Book ID
110328035
Publisher
Springer
Year
2002
Tongue
English
Weight
680 KB
Volume
37
Category
Article
ISSN
0022-2461

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