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Effects of implantation defects on the carrier concentration of 6H-SiC

✍ Scribed by A. Ruggiero; S. Libertino; F. Roccaforte; F. La Via; L. Calcagno

Book ID: 106019972
Publisher: Springer
Year: 2005
Tongue: English
Weight: 406 KB
Volume: 82
Category: Article
ISSN: 1432-0630
DOI: 10.1007/s00339-005-3379-x

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