Evidence for negatively charged vacancy defects in 6H-SiC after low-energy proton implantation

✍ Scribed by Britton, D. T.; Barthe, M.-F.; Corbel, C.; Hempel, A.; Henry, L.; Desgardin, P.; Bauer-Kugelmann, W.; Kögel, G.; Sperr, P.; Triftshäuser, W.

• Book ID: 120539850
• Publisher: American Institute of Physics
• Year: 2001
• Tongue: English
• Weight: 257 KB
• Volume: 78
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.1350961