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Effects of hydrogen on photoluminescence properties of a-SiNx:H films prepared by VHF-PECVD

✍ Scribed by Chao Song; Rui Huang; Xiang Wang; Yanqing Guo; Jie Song; Yixiong Zhang; Zehao Zheng

Book ID: 116244563
Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 772 KB
Volume: 258
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2011.07.071

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