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Effects of Hydrogen Diluted silane plasma on Amorphous Silicon Solar Cells

โœ Scribed by Isomura, Masao; Kondo, Michio; Matsuda, Akihisa


Book ID
118057674
Publisher
Institute of Pure and Applied Physics
Year
2000
Tongue
English
Weight
111 KB
Volume
39
Category
Article
ISSN
0021-4922

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Effect of hydrogen dilution in silane on
โœ P.K. Acharya; H.D. Banerjee; K.L. Chopra; S.C. Saha; Swati Ray ๐Ÿ“‚ Article ๐Ÿ“… 1994 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 362 KB

Hydrogenated amorphous silicon films (a-Si:H) have been deposited by r.f. glow discharge of silane (Sill 4) and hydrogen (H 2) gas mixture. The hydrogen concentration in the gas mixture and the applied r.f. power density have been varied. The initial photoconductivity (crp), photosensitivity (%/~d),