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Effects of HfO2buffer layers on the dielectric property and leakage current of Ba0.6Sr0.4TiO3thin films by pulsed laser deposition

โœ Scribed by Yan Geng; Jin-rong Cheng; Sheng-wen Yu; Wen-biao Wu


Book ID
107482832
Publisher
Chinese Electronic Periodical Services
Year
2010
Tongue
English
Weight
469 KB
Volume
14
Category
Article
ISSN
1007-6417

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Effect of deposition temperature on the
โœ Feng, Zuyong ;Chen, Wei ;Tan, Ooi Kiang ๐Ÿ“‚ Article ๐Ÿ“… 2009 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 322 KB

## Abstract Ba~0.6~Sr~0.4~TiO~3~ (BST) thin films with the thickness of 300 nm were deposited on Pt/SiO~2~/Si substrates at various deposition temperatures by RF magnetron sputtering technique, and their electric properties were investigated. Due to the high temperature annealing process at substra