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Effects of He on Cu film formation by rf sputtering

✍ Scribed by T Koyanagi; K Takao; Y Fukuma

Book ID: 108390465
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 854 KB
Volume: 51
Category: Article
ISSN: 0042-207X
DOI: 10.1016/s0042-207x(98)00258-9

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