Effects of Growth Conditions on Structural Properties of ZnO Nanostructures on Sapphire Substrate by Metal–Organic Chemical Vapor Deposition
✍ Scribed by C. C. Wu; D. S. Wuu; P. R. Lin; T. N. Chen; R. H. Horng
- Publisher
- Springer-Verlag
- Year
- 2009
- Tongue
- English
- Weight
- 1013 KB
- Volume
- 4
- Category
- Article
- ISSN
- 1931-7573
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## 2. Experimental procedures ZnO film was deposited on the SI-GaAs (100) substrate by MOCVD. Diethylzinc (DEZn) and O 2 were chosen as precursor of Zn and O, respectively, and high purity Ar was used as the carrying gas for DEZn. The mol flux ratio of Zn to O was kept at 1:250. The
## Abstract We report on optimization of growth conditions by studying the structural and optical properties of ZnO films grown on sapphire substrate by pulsed laser deposition at different growth temperatures. The crystallographic structure and surface morphology were studied by X‐ray diffraction