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Effects of graphite content on carbon nitride films prepared by hot carbon filament chemical vapor deposition

โœ Scribed by Aizawa, Shinichiro; Aono, Masami; Kitazawa, Nobuaki; Watanabe, Yoshihisa; Shimizu, Osamu; Suda, Yoshihisa


Book ID
126452338
Publisher
AVS (American Vacuum Society)
Year
2003
Tongue
English
Weight
776 KB
Volume
21
Category
Article
ISSN
0734-2101

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