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Effects of Gas Contamination on Conduction in Silicon Oxide Films

✍ Scribed by R. A. Collins


Publisher
John Wiley and Sons
Year
1969
Tongue
English
Weight
97 KB
Volume
35
Category
Article
ISSN
0370-1972

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## Abstract The detection of metallic contaminants in microelectronics devices is one of the main issues in production line. In fact they could diffuse rapidly into the silicon bulk and establishing energy states into the silicon energy‐band gap. The presence of trace of metals on the silicon surfa