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Effects of frequency on optical emission, electrical, ion, and etching characteristics of a radio frequency chlorine plasma

✍ Scribed by Donnelly, Vincent M. (author);Flamm, Daniel L. (author);Bruce, Richard H. (author)

Book ID: 126989976
Publisher: American Institute of Physics
Year: 1985
Tongue: English
Weight: 1003 KB
Volume: 58
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.335978

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