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Effects of filament conditioning and temperature on the composition of gases in the filament assisted CVD of diamond

✍ Scribed by L. Heatherly Jr.; R.E. Clausing

Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 150 KB
Volume: 28
Category: Article
ISSN: 0008-6223
DOI: 10.1016/0008-6223(90)90283-5

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