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Effects of bombardment of negative oxygen ions on amorphous indium gallium zinc oxide thin films by superimposed rf/dc magnetron sputtering

✍ Scribed by Kim, DooHyun; Jang, JinNyoung; Yoon, SooBok; Hong, MunPyo

Book ID
125417663
Publisher
Institute of Pure and Applied Physics
Year
2014
Tongue
English
Weight
903 KB
Volume
7
Category
Article
ISSN
1882-0778

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Effect of oxygen partial pressure on opt
Effect of oxygen partial pressure on optical and electrical properties of co-sputtered amorphous zinc indium tin oxide thin films
✍ Saji, K. J. ;Jayaraj, M. K. πŸ“‚ Article πŸ“… 2008 πŸ› John Wiley and Sons 🌐 English βš– 298 KB

## Abstract Transparent thin films of amorphous zinc indium tin oxide were prepared at room temperature by co‐sputtering of zinc oxide and indium tin oxide. Effect of oxygen partial pressure on the optical and electrical properties of amorphous zinc indium tin oxide thin films were investigated. Co