Effects of atomic hydrogen in gas phase on a-Si:H and poly-Si growth by catalytic CVD

✍ Scribed by Hironobu Umemoto; Yoshitaka Nozaki; Makiko Kitazoe; Katsuhiko Horii; Kentaro Ohara; Daisuke Morita; Kenji Uchida; Yoriko Ishibashi; Manabu Komoda; Koji Kamesaki; Akira Izumi; Atsushi Masuda; Hideki Matsumura

• Book ID: 117145691
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 109 KB
• Volume: 299-302
• Category: Article
• ISSN: 0022-3093
• DOI: 10.1016/s0022-3093(02)00928-6