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Effects of argon gas flow rate and guide shell on oxygen concentration in Czochralski silicon growth

✍ Scribed by REN, B

Book ID
122041191
Publisher
Nonferrous Metals Society of China
Year
2006
Tongue
English
Weight
525 KB
Volume
25
Category
Article
ISSN
1001-0521

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## Abstract The effects of inlet gas concentration and gas flow‐rate on the NO elimination process were studied in a laboratory‐scale biofilter and the removal process is discussed. Various pollutant inlet concentrations and gas flow‐rates were tested in the biofilter. The results showed that the r