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Effects of Ar and H2 annealing on the electrical properties of oxides on 6H SiC

✍ Scribed by E. Stein von Kamienski; A. Gölz; H. Kurz

Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
264 KB
Volume
29
Category
Article
ISSN
0921-5107

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