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Effects of annealing conditions on the properties of tantalum oxide films on silicon substrates

โœ Scribed by S. W. Park; Y. K. Baek; J. Y. Lee; C. O. Park; H. B. Im


Book ID
112814990
Publisher
Springer US
Year
1992
Tongue
English
Weight
425 KB
Volume
21
Category
Article
ISSN
0361-5235

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