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Effects of aluminum incorporation on hafnium oxide film using plasma immersion ion implantation

✍ Scribed by Banani Sen; B.L. Yang; Hei Wong; C.W. Kok; P.K. Chu; A. Huang

Book ID: 104058018
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 677 KB
Volume: 48
Category: Article
ISSN: 0026-2714
DOI: 10.1016/j.microrel.2008.07.069

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