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Effects of alumina and hydrogen peroxide on the chemical-mechanical polishing of aluminum in phosphoric acid base slurry

✍ Scribed by Hong-Shi Kuo; Wen-Ta Tsai

Book ID: 114192461
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 323 KB
Volume: 69
Category: Article
ISSN: 0254-0584
DOI: 10.1016/s0254-0584(00)00299-6

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