Particle size and surfactant effects on chemical mechanical polishing of glass using silica-based slurry

✍ Scribed by Zhang, Zefang ;Liu, Weili ;Song, Zhitang

• Book ID: 115355373
• Publisher: The Optical Society
• Year: 2010
• Tongue: English
• Weight: 739 KB
• Volume: 49
• Category: Article
• ISSN: 1559-128X
• DOI: 10.1364/AO.49.005480