Investigations on the removal mechanisms of diverse alumina based polishing slurries for chemical mechanical polishing of electro-plated NiFe 45/55

✍ Scribed by Rittinger, J.; Cvetkovic, S.; Rissing, L.

• Book ID: 123391858
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 680 KB
• Volume: 110
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2013.02.041