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Effects of Ag addition on phase transformation and resistivity of TiSi2 thin films

✍ Scribed by S.Y. Sun; C.J. Lee; H.S. Chou; J.C. Huang

Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
795 KB
Volume
257
Category
Article
ISSN
0169-4332

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TaON-Ag nanocomposite thin films with Ag nano-particles emerged on TaON surface were prepared by reactive co-sputtering of Ta and Ag in the plasma of O 2 , N 2 , and Ar. The deposition temperature was 300 Β°C. The Ag contents were 2.4, 5.0, 10.6 at.% respectively. After deposition, some samples were