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Effective reduction of AlN defect luminescence by fluorine implantation

✍ Scribed by Vetter, Ulrich; Müller, Sven; Brötzmann, Marc; Hofsäss, Hans; Gruber, John B.

Book ID: 123149284
Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 405 KB
Volume: 20
Category: Article
ISSN: 0925-9635
DOI: 10.1016/j.diamond.2011.03.038

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