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Effect of underlying silicon film on the evolution of microstructure and hardness of the high-temperature annealed carbon film on Si substrate

✍ Scribed by C.K. Chung; B.H. Wu

Book ID: 113793103
Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 591 KB
Volume: 63
Category: Article
ISSN: 0167-577X
DOI: 10.1016/j.matlet.2009.08.021

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