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Effect of total hydrogen content in silicon nitride sensitive film on performance of ISFET

✍ Scribed by Keming Chen; Guohua Li; Huiyun Lu; Langxing Chen

Book ID: 103960609
Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 418 KB
Volume: 12
Category: Article
ISSN: 0925-4005
DOI: 10.1016/0925-4005(93)85007-w

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