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Effect of total pressure on the formation and size evolution of silicon quantum dots in silicon nitride films

โœ Scribed by Rezgui, B.; Sibai, A.; Nychyporuk, T.; Lemiti, M.; Bremond, G.; Maestre, D.; Palais, O.


Book ID
120388294
Publisher
American Institute of Physics
Year
2010
Tongue
English
Weight
559 KB
Volume
96
Category
Article
ISSN
0003-6951

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