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Effect of the transition layer on ellipsometric measurement of nanodimensional layers

โœ Scribed by D. I. Bilenko; V. P. Polyanskaya; M. A. Getsman; D. A. Gorin; A. A. Neveshkin; A. M. Yaschenok

Book ID
110143233
Publisher
Springer
Year
2005
Tongue
English
Weight
120 KB
Volume
50
Category
Article
ISSN
1063-7842

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Ellipsometric measurements of the barrie
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Ahatract -The composite oxide film (hydrous + anodic) formed on aluminum foil was chemically stripped to remove only the outer hydrous layer. Ellipsometry of the remaining barrier film showed it to be thinner and have a higher refractive index than conventional anodic barrier films grown to the same