Effect of the degree of high power impulse magnetron sputtering utilisation on the structure and properties of TiN films

✍ Scribed by Hovsepian, Papken Eh.; Sugumaran, Arunprabhu A.; Purandare, Yashodhan; Loch, Daniel A.L.; Ehiasarian, Arutiun P.

• Book ID: 122468202
• Publisher: Elsevier Science
• Year: 2014
• Tongue: English
• Weight: 987 KB
• Volume: 562
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2014.04.002