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Effect of temperature on the properties of Al:ZnO films deposited by magnetron sputtering with inborn surface texture

✍ Scribed by Weimin Li; Huiying Hao

Publisher: Springer
Year: 2011
Tongue: English
Weight: 669 KB
Volume: 47
Category: Article
ISSN: 0022-2461
DOI: 10.1007/s10853-011-6196-y

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## Abstract Hexagonal aluminium nitride (AlN) and zinc oxide (ZnO) thin films have been deposited by DC and RF reactive magnetron sputtering at room temperature. For a first set of samples, sputtered AlN films were deposited on silicon ZnO substrate. For a second set, ZnO films were deposited on Al