Effects of substrate temperature on micr
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Wei Yu; Xinzhan Wang; Wanbing Lu; Shufang Wang; Yalan Bian; Guangsheng Fu
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Article
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2010
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Elsevier Science
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English
โ 410 KB
Nanocrystalline silicon carbide (nc-SiC) thin films have been grown on silicon (1 0 0) substrates by helicon wave plasma enhanced chemical vapor deposition technique and the photoluminescence of the films has been tuned from yellow to blue by changing the substrate temperatures (T s ). The resulting